Qhov zoo tshaj plaws EDI Systems rau Semiconductor Manufacturing: Ua kom muaj dej zoo Ultrapure

Cov dej zoo yog qhov tseem ceeb heev rau kev ua cov semiconductors. Txhawm rau kom txawm tias qhov me me ntawm cov av los ntawm kev nkag mus rau hauv lub voj voog rhiab, cov dej ultrapure siv hauv chip txiav yuav tsum tau dhau cov txheej txheem purity nruj heev. Qhov no yog thaum electrodeionization (EDI) systems los ua ke. Ib tug sophisticated EDI cog siv kev sib xyaw ntawm kev pauv ion membranes thiab hluav taws xob tam sim no kom tshem tawm cov ions thiab ua cov dej ntshiab heev yam tsis tas yuav siv cov tshuaj los ntxuav cov membranes. Txhawm rau kom paub tseeb tias lawv cov txheej txheem tsim khoom ib txwm muaj cov dej ntshiab zoo, cov chaw tsim khoom semiconductor yuav tsum siv cov cuab yeej txiav-ntug edi systemCov txheej txheem EDI zoo tshaj plaws rau cov ntawv thov semiconductor muaj ob peb qhov txiaj ntsig tseem ceeb: lawv tsim cov dej nrog cov khoom siv hluav taws xob tsawg heev (feem ntau tsawg dua 0.1 μS / cm), lawv tuaj yeem khiav tas li yam tsis tas yuav rov ua dua tshiab, lawv siv cov tshuaj me me, thiab lawv me me thiab ua haujlwm tau zoo. Lub Hoobkas EDI tuaj yeem ua cov dej ntshiab uas xav tau rau cov theem ntxuav tseem ceeb, kev sib xyaw tshuaj, thiab lwm yam txheej txheem tsim khoom semiconductor thaum nws txuas nrog lub kaw lus ntxuav dej tiav. Cov txheej txheem no pab tiv thaiv cov chips kom tsis txhob muaj ntau qhov yuam kev thiab ua kom lawv cov txiaj ntsig ntau tshaj plaws los ntawm kev tshem tawm txawm tias me me ntawm cov khoom tsis huv.

Lub luag haujlwm tseem ceeb ntawm Ultrapure Dej hauv Semiconductor Manufacturing

Ua ntej peb mus rau hauv cov ntsiab lus ntawm EDI thev naus laus zis, cia peb tham txog vim li cas cov dej ntshiab huv yog qhov tseem ceeb heev rau kev ua cov khoom siv semiconductors. Ua kev sib xyaw ua ke thiab lwm yam khoom siv semiconductor suav nrog ntau theem uas xav tau cov dej ntshiab li sai tau. Txawm tias me me ntawm cov pa phem yuav ua rau muaj teeb meem loj hauv cov qauv minuscule uas tau ua.

Cov qauv dej tseem ceeb

Qee qhov tseem ceeb tshaj plaws ntsuas dej zoo uas yuav tsum tau saib xyuas kom zoo rau kev tsim khoom semiconductor yog:

• Resistivity: Feem ntau ntau tshaj 18 MΩ·cm ntawm 25 ° C
• Tag nrho cov organic carbon (TOC): tsawg dua 1 ppb
• Particles: tsawg dua 1 particle / mL rau cov khoom uas loj dua 0.1 μm
• Silica uas tau yaj: tsawg dua 0.1 ppb
• Oxygen uas yaj: tsawg dua 1 ppb

Yuav kom ua tau raws li cov txheej txheem nruj no, dej yuav tsum dhau los ntawm ntau cov txheej txheem purification. EDI yog ib qho tseem ceeb kawg kauj ruam uas tshem tawm cov ions seem. Cov electrodeionization system ua haujlwm nrog lwm cov thev naus laus zis, xws li thim rov qab osmosis, ultrafiltration, thiab kev kho UV, ua kom dej uas yuav luag tsis muaj kuab paug.

Siv hauv Kev Ua Semiconductors

Hauv ntau qhov chaw ntawm cov txheej txheem tsim khoom semiconductor, dej ultrapure ua los ntawm EDI cov nroj tsuag yog siv, xws li:

• Ntxuav thiab ntxuav lub wafer
• Tsim thiab stripping photoresist
• Tshuaj Mechanical Planarization (CMP)
• Cov txheej txheem ntub dej etching
• Sib tov thiab diluting tshuaj
• Khaws cov cuab yeej txias

Qhov zoo thiab sib xws ntawm cov dej siv hauv cov ntawv thov no muaj kev cuam tshuam ncaj qha rau kev tawm los, kev ua haujlwm ntawm cov cuab yeej, thiab kev ntseeg tau. Raws li cov khoom siv semiconductor tau me dua thiab nyuaj dua, qhov kev xav tau ntawm cov dej ntshiab yog qhov tseem ceeb dua. Qhov no yog vim li cas cov thev naus laus zis ua kom huv huv zoo li EDI tau dhau los ua qhov tseem ceeb.

Nkag siab EDI Technology rau Semiconductor Kev Kho Dej

Electrodeionization yog ib txoj hauv kev zoo tshaj plaws los ntxuav cov dej uas siv cov hauv paus ntsiab lus ntawm electrodialysis thiab ion pauv kom tshem tawm cov ions yaj. EDI ua haujlwm txhua lub sijhawm thiab ua rau cov dej tsis tu ncua zoo, tsis zoo li cov txheej txheem deionization yav dhau los uas yuav tsum tau rov tsim dua tshiab txhua zaus.

Yuav ua li cas EDI muaj nuj nqi

Qhov tseem ceeb ntawm EDI system yog ib pawg ntawm daim nyias nyias uas hloov ntawm cations thiab anions. Ion txauv resin hlaws npog npog qhov khoob ntawm cov membranes. Ib qho hluav taws xob yog muab rau pawg thaum cov dej ntws los ntawm nws, uas ua rau cov ions txav mus rau hauv daim nyias nyias. Qhov tseem ceeb tshaj plaws ntawm cov txheej txheem EDI yog:

• Kev tshem tawm ntawm ions: Cov electrodes, uas muaj cov nqi sib txawv, nyiam cov ions yaj hauv cov dej pub thiab pib thauj lawv ntawm cov ion pauv resins.
• Membrane sib cais: Cov kev xaiv ion txauv membranes cia cov ions los ntawm. Cations txav mus rau cathode thaum anions txav mus rau lub anode.
• Concentration thiab tshem tawm: Cov ions tau sib sau ua ke hauv cov chav sib cais thiab tom qab ntawd ntws tawm ntawm qhov system raws li cov dej tsis lees paub.
• Resin regeneration: Cov hluav taws xob tam sim no rhuav tshem cov dej molecules rau hauv H + thiab OH- ions, uas ua rau cov ion pauv resins tsis tawg.

Cov txheej txheem txuas ntxiv no, tsis muaj tshuaj lom neeg rov ua dua tshiab tso cai rau EDI cov tshuab ua haujlwm zoo rau lub sijhawm ntev yam tsis muaj kev txwv, uas yog qhov zoo tshaj plaws rau cov kev xav tau nruj ntawm cov khoom siv semiconductor.

Cov txiaj ntsig ntawm EDI rau Kev Siv Semiconductor

Muaj ntau cov txiaj ntsig tseem ceeb ntawm kev siv EDI thev naus laus zis los tsim cov dej ntshiab hauv semiconductor fabs:

• High purity txhua lub sijhawm: EDI tshuab tuaj yeem ua dej tsis tu ncua nrog kev tiv thaiv ntau dua 18 MΩ·cm thiab cov ions yaj tsawg heev.
• Kev ua haujlwm tsis tu ncua: EDI ua haujlwm yam tsis tas yuav mus offline rau kev rov tsim dua tshiab, uas txawv ntawm lwm lub tshuab ion pauv.
• Tsis muaj tshuaj lom neeg: Cov txheej txheem electrochemical regeneration tsis ua raws li qhov yuav tsum tau ua rau cov tshuaj acid thiab caustic regeneration chemicals.
• Cov nqi khiav lag luam qis: EDI tshuab tsis siv ntau lub zog thiab tsis xav tau ntau yam tshuaj.
• Cov hneev taw me me: Qhov xwm txheej ntawm EDI tshuab ua kom yooj yim siv qhov chaw zoo hauv cov nroj tsuag semiconductor.
• Flexibility: EDI tuaj yeem ua raws li cov kev hloov pauv hauv qhov zoo thiab qhov ntws ntawm cov dej pub thaum tseem tsim tau tib yam.

Cov txiaj ntsig no ua rau EDI yog ib feem tseem ceeb ntawm cov tshuab dej ultrapure tam sim no los ua cov khoom siv hluav taws xob. Nws yog ib txoj hauv kev zoo thiab muaj txiaj ntsig kom ua tiav cov qauv dej zoo.

Xaiv thiab siv qhov zoo tshaj plaws EDI System rau koj qhov chaw Semiconductor

Thaum xaiv qhov zoo tshaj plaws EDI cog system rau cov khoom siv hluav taws xob semiconductor, koj yuav tsum xav txog ntau yam. Cov lus teb zoo tshaj plaws yuav vam khom koj cov kev xav tau ntawm koj cov txheej txheem, qhov zoo ntawm koj cov dej pub, thiab tag nrho cov qauv ntawm koj qhov kev kho dej.

Tej yam tseem ceeb uas yuav tau xav txog thaum xaiv EDI System

Thaum nrhiav EDI tshuab rau kev siv semiconductor, xav txog cov no:

• Muaj peev xwm xav tau: Nco ntsoov tias lub kaw lus tuaj yeem tswj koj qhov kev xav tau siab tshaj plaws thiab muaj chaw loj hlob yav tom ntej.
• Qhov zoo ntawm cov dej pub: EDI system yuav ua haujlwm zoo tshaj yog tias cov dej tau raug kho kom zoo, uas feem ntau txhais tau tias siv rov qab osmosis.
• Cov lus qhia tshwj xeeb rau qhov zoo ntawm cov khoom siv dej: Tshawb xyuas seb lub kaw lus puas tuaj yeem ua tau raws li ib txwm muaj lossis tshaj qhov koj xav tau rau cov dej ntshiab.
• Tus nqi rov qab: Nrhiav cov tshuab uas rov qab tau dej ntau los txiav cov khoom pov tseg thiab cov nqi ua haujlwm.
• Nws siv zog npaum li cas? Txhawm rau txuag nyiaj ntawm cov nqi khiav, sib piv ntau npaum li cas lub zog sib txawv EDI qauv siv.
• Yuav tsum tau hneev taw thiab kev teeb tsa: Xav txog seb koj muaj qhov chaw ntau npaum li cas thiab nws yuav haum rau qhov koj twb muaj lawm.
• Lub peev xwm los saib xyuas thiab tswj: Cov txheej txheem saib xyuas qib siab tuaj yeem pab kom paub tseeb tias cov khoom ua haujlwm zoo thiab cov teeb meem tau pom ntxov.
• Pab nrog kev saib xyuas thiab kev pabcuam: Tshawb xyuas cov chaw tsim khoom lub koob npe nrov rau kev cia siab thiab kev txhawb nqa tom qab muag.

Yuav ua li cas nws haum rau tag nrho cov kev kho dej

cov EDI system Nws yog ib qho tseem ceeb ntawm txoj kev kho dej ultrapure tag nrho, yog li nws yog ib qho tseem ceeb uas yuav tau xav txog seb nws haum li cas. Ib qho dej lim dej ib txwm siv yuav muaj:

• Kev kho ua ntej (tshem tawm cov tshuaj chlorine, lim, thiab muag muag)
• Rov qab osmosis (RO)
• Polishing EDI
• Ultrafiltration (UF)
• Disinfection nrog UV teeb
• Cov kauj ruam kawg ntawm kev lim dej
• Cia thiab xa khoom

EDI system yuav tsum muaj qhov loj me thiab ua haujlwm zoo nrog rau lwm qhov chaw. Ua tib zoo saib xyuas seb lub kaw lus tau tsim li cas tuaj yeem pab nws khiav zoo dua, ua haujlwm tau zoo, thiab muaj kev ntseeg siab dua.

Kev saib xyuas thiab saib tsis tu ncua

Teem lub sijhawm tu thiab saib xyuas tag nrho rau koj qhov system EDI kom paub tseeb tias nws ua haujlwm zoo thiab kav ntev. Qhov no yuav tsum muaj xws li:

• Kev tshuaj xyuas tsis tu ncua ntawm kev ua haujlwm thiab kev sau cov ntaub ntawv
• Ntxuav thiab ntxuav cov kev kho mob uas tshwm sim txhua zaus
• Hloov cov khoom siv (xws li cov ntxaij lim dej) raws li qhov chaw tsim khoom hais kom ua
• Teem cov qib zoo rau kev soj ntsuam cov cuab yeej
• Kev cob qhia cov neeg ua haujlwm txog kev siv thiab kho cov khoom kom raug

Cov neeg tsim khoom semiconductor tuaj yeem ua kom paub tseeb tias lawv ib txwm muaj cov dej ntshiab txaus los txhawb lawv cov txheej txheem tsim khoom tseem ceeb los ntawm kev ua tib zoo xaiv, teeb tsa, thiab ua raws li cov txheej txheem EDI siab heev.

Cov Lus Nug

1.Yuav ua li cas EDI txawv ntawm ion pauv hloov rau tu dej rau semiconductors?

EDI muaj ntau cov txiaj ntsig tshaj li kev sib pauv ion classical rau siv hauv semiconductors. EDI ua haujlwm txhua lub sijhawm yam tsis xav tau cov tshuaj kom rov tsim dua tshiab, tsis zoo li cov txheej txheem sib pauv ion ib txwm xav tau cov tshuaj ua haujlwm txhua zaus. Qhov no ua rau cov dej zoo dua qub, tsis muaj sijhawm poob qis, thiab cov nqi pheej yig dua rau kev tuav thiab tshem tawm cov tshuaj. EDI cov tshuab tseem nyiam siv qhov chaw tsawg dua thiab ua kom dej nrog cov purity ntau dua, uas ua rau lawv zoo meej rau cov qauv nruj ntawm cov khoom siv semiconductor.

2.Dab tsi yog qhov kev saib xyuas ib txwm xav tau rau EDI system ntawm cov nroj tsuag semiconductor?

EDI cov tshuab tsis xav tau kev saib xyuas ntau npaum li lwm cov thev naus laus zis lim dej, tab sis lawv xav tau kev saib xyuas tsis tu ncua los ua haujlwm zoo tshaj plaws. Cov haujlwm saib xyuas feem ntau suav nrog kev tshuaj xyuas cov ntsuas kev ua haujlwm tseem ceeb (xws li dej tsis zoo, kev poob siab, thiab hluav taws xob tam sim no), ntxuav lossis hloov cov electrodes thiab daim nyias nyias ua ntu zus (feem ntau ib xyoos ib zaug lossis ob zaug hauv ib xyoos), thiab xyuas kom meej tias cov txheej txheem ua ntej ua haujlwm zoo. Txoj kev npaj tshwj xeeb rau kev saib xyuas yuav nyob ntawm seb nws siv li cas, tab sis feem ntau cov tuam ntxhab suav nrog cov lus qhia dav dav txog yuav ua li cas tiv thaiv kev saib xyuas.

3.Yuav ua li cas qhov zoo ntawm cov dej pub rau cov kev ua tau zoo ntawm EDI nyob rau hauv semiconductor daim ntaub ntawv?

Qhov zoo ntawm cov dej pub mis yog qhov tseem ceeb heev rau EDI ua haujlwm zoo hauv kev siv semiconductor. Feem ntau, EDI system xav tau cov dej pub mis uas twb tau kho los ntawm kev siv rov qab osmosis (RO) kom tshem tawm feem ntau ntawm cov khoom tawg. Rau EDI, cov dej nkag zoo tshaj plaws yuav tsum muaj qhov ua tau tsawg dua 20-40 μS / cm, hardness tsawg dua 1 ppm li CaCO3, thiab cov ntsiab lus silica tsawg dua 1 ppm. Ntau ntawm cov pa phem no tuaj yeem ua rau EDI tsis tshua muaj txiaj ntsig thiab ua rau cov membranes scale los yog qias neeg. Txhawm rau ua kom EDI ua haujlwm zoo thiab kav ntev ntev hauv cov tshuab lim dej semiconductor, cov dej pub yuav tsum tau ua kom zoo thiab nws qhov zoo yuav tsum tau kuaj xyuas tsis tu ncua.

High-Efficiency EDI Nroj Tsuag rau Semiconductor Manufacturing | Morui

Koj puas xav tau lub tshuab EDI uas ntseeg tau thiab ua tau zoo uas ua tau raws li cov qauv dej zoo ntawm koj lub Hoobkas tsim khoom semiconductor? Guangdong Morui Environmental Technology Co., Ltd. yog qhov chaw mus. Peb qhov kev txiav txim siab tshiab EDI cov nroj tsuag yog tsim los muab cov dej ultrapure uas ib txwm zoo ib yam rau cov khoom siv semiconductor tshaj plaws.

Peb muaj ntau xyoo ntawm kev paub txog kev kho dej technology thiab kev nkag siab ntawm kev lag luam semiconductor cov kev xav tau tshwj xeeb. Peb tuaj yeem muab cov kev daws teeb meem uas ua haujlwm zoo nrog koj cov dej huv tam sim no. Peb cov nroj tsuag EDI suav nrog cov cuab yeej siv thev naus laus zis, kev siv hluav taws xob tsawg, thiab kev tswj tau yooj yim kom paub tseeb tias lawv ua haujlwm zoo thiab ua haujlwm yooj yim.

Tsis txhob tso tseg rau qhov zoo ntawm koj cov dej rau kev ua haujlwm tseem ceeb ntawm semiconductor. Email rau peb ntawm yog benson@guangdongmorui.com niaj hnub no kom paub seb peb lub tshuab EDI tuaj yeem pab koj li cas thiab khaws cov dej ntshiab huv uas koj xav tau. Guangdong Morui tuaj yeem yog koj tus khub ntseeg siab hauv kev siv thev naus laus zis los ntxuav dej hauv semiconductors.

References

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2. Chen, X., & Wang, Y. (2022). Electrodeionization hauv kev tsim cov dej semiconductor-qib: Tam sim no lub xeev thiab yav tom ntej muaj peev xwm. Separation thiab Purification Technology, 288, 120560.

3.Semiconductor Industry Association. (2023). Yuav tsum muaj dej zoo rau kev tsim khoom semiconductor siab heev. Technical Report 2023-03 los ntawm SIA.

4. Lee, JH, Kim, SY, Park, JS (2021). Kev sib piv ntawm ion pauv thiab electrodeionization rau kev tsim cov dej ultrapure hauv semiconductor fabs. Microelectronic Engineering, 242, 111585.

5. Zhang, L., Liu, Q. (2022). Kev txhim kho ntawm EDI tshuab rau kev ua cov dej ntshiab huv hauv kev lag luam semiconductor. Industrial & Engineering Chemistry Research, 61(14), 5132–5143.

6.World Semiconductor Council. (2023). Txoj hauv kev zoo tshaj plaws los cawm thiab ntxuav dej hauv cov chaw tsim khoom semiconductor. 2023 WSC Environmental Report.